Protective gas chamber for XHV-adequate processes

The shielding gas chamber mainly consists of three parts:

• Protective gas chamber for working with reactive process gases
• airlock systems
• Interventions in the front window

• Closed working chamber that can be filled with shielding gas
• Handling: manually adjustable 3-axis system (x approx. 100 mm; y approx. 100 mm, z approx. 600 mm)
• automatic traversing unit linear axis approx. 100 mm (mode: potentiometer controlled - down/up)
• Chamber size: height approx. 1350 mm; width approx. 1200 mm; depth approx. 900 mm
• Oxygen control: by means of oxygen meter
• Working in slight overpressure due to constant argon flow into the chamber
• Access to the working chamber via 5 glove ports in the front window
• 2 vacuum lock systems    

Filling gases:

• argon
• helium
• Argon/helium mixtures
• nitrogen
• are introduced via an adjustable volume flow
• Filling time approx. 12-24 hours

Process gases containing silane:

• Argon N50 with 1.5% silane UHP by volume
• Helium N46 with 1.5 % by volume silane UHP
• are introduced via a plastic hose and directed to the reaction site using a gas cannula
• Gas control via a special manometer, which must be purged afterwards